Chinese Optics Letters, 2007, 5 (4): 215, Published Online: Jun. 26, 2007
Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching Download: 597次
集成光学 绝缘体上的硅(SOI) 多模干涉 配对干涉 耦合器 250.5300 Photonic integrated circuits 130.2790 Guided waves 220.4610 Optical fabrication
Abstract
A 3-dB paired interference (PI) optical coupler in silicon-on-insulator (SOI) based on rib waveguides with trapezoidal cross section was designed with simulation by a modified finite-difference beam propagation method (FD-BPM) and fabricated by potassium hydroxide (KOH) anisotropic chemical wet etching. Theoretically, tolerances of width, length, and port distance are more than 1, 100, and 1 microns, respectively. Smooth interface was obtained with the propagation loss of 1.1 dB/cm at the wavelength of 1.55 microns. The coupler has a good uniformity of 0.2 dB and low excess loss of less than 2 dB.
Zhiyong Li, Jinzhong Yu, Shaowu Chen, Jingwei Liu, Jinsong Xia. Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching[J]. Chinese Optics Letters, 2007, 5(4): 215.