中国激光, 1994, 21 (6): 522, 网络出版: 2007-08-17
脉冲CO2激光制备纳米级SiC粉末
Pulsed CO2Laser Assisted Synthesis of Nanometer SiC Ceramic Powder
摘要
采用脉冲TEA CO2激光诱发SiH4+CH4等离子体化学气相反应，合成了粒度分布均匀的纳米SiC球型陶瓷粉末，采用傅里叶红外光谱、X射线衍射、元素分析、透射电子显微镜等多种技术对粉末性能进行了分析，利用光学发射谱技术对反应过程进行了初步研究。
Abstract
Nanometer SiC ceramic powder has been produced by TEA CO2 laser induced SiH4+CH4 plasma chemical reaction. Powder character and property have ben studied through FTIR spectroscopy, X-ray diffraction, elements analysis and transmution electron microscopy technique. In addition, the gas-phase reaction process was discussed with the result of optical emission spetroscopy.
韩理, 于威, 傅生, 李晓苇, 张连水. 脉冲CO2激光制备纳米级SiC粉末[J]. 中国激光, 1994, 21(6): 522. 韩理, 于威, 傅生, 李晓苇, 张连水. Pulsed CO2Laser Assisted Synthesis of Nanometer SiC Ceramic Powder[J]. Chinese Journal of Lasers, 1994, 21(6): 522.
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