中国激光, 1994, 21 (12): 945, 网络出版: 2007-08-17
具有分束和聚焦功能的氮化硅二元位相型光学元件
Silicon Nitride Binary-Phase Optical Elements with the Function of Splitting and Focussing
非晶氮化硅 Dammann光栅 Fresnel波带板 光分束器 二元光学元件 amorphous silicon nitride Dammann grating Fresnel zone plate beam splitter binary optical element
摘要
报道了自行设计的将二维Dammann光栅和Fresnel波带板集成为一体的同时具有分束和聚焦功能的二元位相型光分束器,并用等离子体增强化学气相淀积法(PECVD)制备的非晶氨化硅(α-SiNx:H)薄膜制作了这样的元件,成功地实现了设计的功能,分束阵列为3×3,焦距为18 cm,分束后的光强分布相对误差小于5%。
Abstract
Having both functions of beam splitting and focussing a home designed binary-optical beam splitter combined with a two-dimensional Dammann grating and a Fresnel zone plate is reported. This element is achieved by means of amorphous silicon nitride thin films. The split arrays are 3×3 and the focus length is 18 cm. The relative distribution error of the split beam intensity is less than 5%.
黄信凡, 李志锋, 高文琦, 周进, 顾晓峰, 陈坤基. 具有分束和聚焦功能的氮化硅二元位相型光学元件[J]. 中国激光, 1994, 21(12): 945. 黄信凡, 李志锋, 高文琦, 周进, 顾晓峰, 陈坤基. Silicon Nitride Binary-Phase Optical Elements with the Function of Splitting and Focussing[J]. Chinese Journal of Lasers, 1994, 21(12): 945.
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