光学学报, 1994, 14 (2): 169, 网络出版: 2007-08-17
硅键合SOI平面光波导探索
Investigation of Planar Optical Wavequides with DWB/SOI Structure
摘要
本文分析了SIMOX/SOI和DWB/SOI结构的性能特点.尝试用DWB/SOI材料制备不同波导层厚度的平面光波导样品,并测试了1.15 μm和1.523 μm激光的TE和TM模的传输损耗.1.523 μm光的TE模的最小传输损耗已达0.27 dB/cm.说明DWB/SOI材料是一种有潜力的光波导材料.
Abstract
The structure characteristics of SIMOX/SOI (Separation by implanted oxygen/silicon on insulator) and DWB (direct wafer bonding)/SOI are discussed. Some planar optical waveguides samples with different thickness of layer were fabricated in DWB/SOI structure. The propagstion losses were measured for both TE and TM modes at wavelenths of 1.15 μm and 1.523 μm. The lowest loss is close to the intrinsic aborption of pure crystal silicon. It indicated that the DWB/SOI structure is a Potential material for optical waveguides.
李金华, 林成鲁, G. T. Reed, A. G. Rickman, P. L. F. Hemment. 硅键合SOI平面光波导探索[J]. 光学学报, 1994, 14(2): 169. 李金华, 林成鲁, G. T. Reed, A. G. Rickman, P. L. F. Hemment. Investigation of Planar Optical Wavequides with DWB/SOI Structure[J]. Acta Optica Sinica, 1994, 14(2): 169.
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