光学学报, 1994, 14 (12): 1288, 网络出版: 2007-08-17
移相干涉术的一种新算法:重叠四步平均法 
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A New Algorithm on Phase Shifting Interferometry——The Overlapping Averaging 4-Frame Algorithm
摘要
提出了一种能大大地减小由于移相器的位移误差而引起相位复原误差的新方法,即重叠四步平均法.给出了这种方法的相位复原精度与移相器的位移误差之间的关系式,从关系式中可见,OAF算法大大地减小由于移相器的位移误差而引起相位复原误差.通过计算机模拟,得到了各种算法的相位复原精度与移相器的位移误差之间的关系曲线,分析可得,重叠四步平均法算法比其它算法有更高精度.
Abstract
This paper presents a new algorithm, the overlapping averging 4-frame (OAF) algorithm, which can reduce the phase error caused by phase shifter error. The relationship between the accuracy of OAF algorithm and phase shifter errors is given.Based on this relationship, it is verfied that the OAF algorithm can reduce the phase error from phase shifter error. The computer simulation has shown the magnitude of a calibration error and nonlinearity in the phase shifter for a number of different phasemeasurement algorithm has higher accurcy than other phase-measurement algorithms.
朱日宏, 陈进榜, 王青, 陈磊. 移相干涉术的一种新算法:重叠四步平均法[J]. 光学学报, 1994, 14(12): 1288. 朱日宏, 陈进榜, 王青, 陈磊. A New Algorithm on Phase Shifting Interferometry——The Overlapping Averaging 4-Frame Algorithm[J]. Acta Optica Sinica, 1994, 14(12): 1288.
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