中国激光, 1995, 22 (2): 123, 网络出版: 2007-08-17
用二元光学方法制作的高效率衍射光栅
High Efficient Diffractive Grating Produced by Binary Optics
摘要
用二元光学理论讨论高衍射效率的光栅的原理及其制作方法.并用微电子工艺做出了二次量化四位相台阶的光栅，实验测得一级衍射效率为68%。
Abstract
In this paper, the fundamental principle and fabrication method for obtaining high efficiency diffractive gratings are described. Experimental result shows that the firstorder diffractive efficiency of a four-level staircase grating is 68%.
周进, 高文琦, 黄信凡, 陈伯荣, 陈杰, 陈文萍. 用二元光学方法制作的高效率衍射光栅[J]. 中国激光, 1995, 22(2): 123. 周进, 高文琦, 黄信凡, 陈伯荣, 陈杰, 陈文萍. High Efficient Diffractive Grating Produced by Binary Optics[J]. Chinese Journal of Lasers, 1995, 22(2): 123.
PDF全文
