摘要

报道了用脉冲激光淀积(PLD)方法在磷酸氧钛钾(KTP)晶体(100)面上生长沿[110]取向的铌酸钡钠(BNN)光波导薄膜。X射线衍射，扫描电子显微镜，X射线光电子能借测量表明生长的ＢＮＮ膜是外延单晶膜。膜表面粗糙度很小。光波导模式和光损耗测量表明膜具有较低的损耗。

Abstract

This paper reports that the barium sodium niobate (BNN) optical-waveguide film with orientation [110] has been epitaxially grown on the (100) plane of substrate KTiOPO4(KTP) by pulsed laser deposition (PLD). The measurements of XRD, SEM and XPS show that the as- grown BNN film is epitaxial single crystal with smooth surface. The measurements of optical-waveguide mode and propagation loss indicate that the film is of good optical waveguide properties with low loss.

补充资料

所属栏目：材料与薄膜

收稿日期：1994-08-02

修改稿日期：1994-11-14

网络出版日期：--

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引用该论文

张苹,张锋,刘俊明,刘治国. Investigation on Barium Sodium Niobate Optical-Waveguide Films by Pulsed Laser Deposition Technique[J]. Chinese Journal of Lasers, 1995, 22(6): 461-464

张苹,张锋,刘俊明,刘治国. 铌酸钡钠光波导薄膜的脉冲激光淀积制备和研究[J]. 中国激光, 1995, 22(6): 461-464