中国激光, 1995, 22 (6): 461, 网络出版: 2007-08-17
铌酸钡钠光波导薄膜的脉冲激光淀积制备和研究
Investigation on Barium Sodium Niobate Optical-Waveguide Films by Pulsed Laser Deposition Technique
光波导 脉冲激光淀积 铌酸钡钠 磷酸氧钛钾 optical-waveguide pulsed laser deposition barium sodium niobate potassium titanyl phosphate
摘要
报道了用脉冲激光淀积(PLD)方法在磷酸氧钛钾(KTP)晶体(100)面上生长沿[110]取向的铌酸钡钠(BNN)光波导薄膜。X射线衍射,扫描电子显微镜,X射线光电子能借测量表明生长的BNN膜是外延单晶膜。膜表面粗糙度很小。光波导模式和光损耗测量表明膜具有较低的损耗。
Abstract
This paper reports that the barium sodium niobate (BNN) optical-waveguide film with orientation [110] has been epitaxially grown on the (100) plane of substrate KTiOPO4(KTP) by pulsed laser deposition (PLD). The measurements of XRD, SEM and XPS show that the as- grown BNN film is epitaxial single crystal with smooth surface. The measurements of optical-waveguide mode and propagation loss indicate that the film is of good optical waveguide properties with low loss.
张苹, 张锋, 刘俊明, 刘治国. 铌酸钡钠光波导薄膜的脉冲激光淀积制备和研究[J]. 中国激光, 1995, 22(6): 461. 张苹, 张锋, 刘俊明, 刘治国. Investigation on Barium Sodium Niobate Optical-Waveguide Films by Pulsed Laser Deposition Technique[J]. Chinese Journal of Lasers, 1995, 22(6): 461.