光学学报, 1995, 15 (8): 1140, 网络出版: 2007-08-17
类金刚石薄膜红外光学常数的计算机拟合
Curve Fitting to Determine IR Optical Constants of Diamond-Like Films
摘要
报道了一种对类金刚石薄膜红外透射率曲线最小二乘法拟合的方法，确定类金刚石薄膜的红外光学常数─—折射率、吸收系数以及薄膜厚度及表面粗糙度。介绍了相应的数学模型，并给出了对类金刚石薄膜样品的实测及拟合结果。
Abstract
A transmittance curve fitting method was used to determine the IR refractive index, absorption coeffecient, thickness and surface roughness of diamond-like films. A mathematical model to calculate the transmittance function of diamond-like films on silicon substrate is introduced. The experimental measurement and curve fitting results are given.
宋强, 邢中菁, 沈元华, 应萱同. 类金刚石薄膜红外光学常数的计算机拟合[J]. 光学学报, 1995, 15(8): 1140. 宋强, 邢中菁, 沈元华, 应萱同. Curve Fitting to Determine IR Optical Constants of Diamond-Like Films[J]. Acta Optica Sinica, 1995, 15(8): 1140.
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