光学学报, 2007, 27 (7): 1255, 网络出版: 2007-08-17   

数字微镜器件的相位调制性质

Phase Modulation Properties of Digital Micromirror Device
作者单位
安徽大学计算智能与信号处理教育部重点实验室, 合肥 230039
摘要
为了提高数字微镜器件(DMD)的空间光调制性能,发挥其在光信息处理中的作用,研究了的数字微镜器件相位调制性质。通过分析数字微镜器件的微观物理结构,考察了数字微镜器件的光栅特性;从计算的角度研究了其对相干光波的相位调制,并给出数学描述和实验结果。重点研究了数字微镜器件的衍射光栅特性,分析了其工作原理及微镜偏转导致的镜片空间相对位置的改变,利用闪耀光栅理论计算了偏转微镜间的相位差,得出了数字微镜器件光栅的闪耀规律,实现了闪耀状态。提出了利用不同方向的微镜列状态研究数字微镜器件相位调制性质的方法,推导和模拟了关于数字微镜器件的微结构和工作原理,在数字微镜器件光调制研究方面提供了一些结果,对数字微镜器件在信息光学中的更广泛应用有一定意义。
Abstract
To improve the spatial light modulation properties of digital micromirror device (DMD), and exert its performance in optical information processing, the phase modulation properties of digital micromirror device have been investigated. Based on digital micromirror device microstructure, its grating properties is investigated, its effect of phase modulation on coherent light is calculated, and the mathematic discription and experimental results are presented. The diffraction grating properties digital micromirror devices are mainly investigated, analyzes its working principle and the change of position between micromirrors by micromirror rotation is analyzed. With the theory of blazed diffraction grating, the phase difference between rotated mirrors has been calculated, the blazed rule of DMD gratings is found and blazed condition is realized. Methods of analyzing digital micromirror device phase modulation by mirrors on different directions have been proposed. The microstructure and working principle of digital micromirror device are deduced and simulated. Results on digital micromirror device light modulation are presented, which are meaningful for broad application of digital micromirror device in information optics.

王大鹏, 韦穗. 数字微镜器件的相位调制性质[J]. 光学学报, 2007, 27(7): 1255. 王大鹏, 韦穗. Phase Modulation Properties of Digital Micromirror Device[J]. Acta Optica Sinica, 2007, 27(7): 1255.

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