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软X射线并联平场光栅的设计

Design of Parallel Flat-Field Gratings in Soft X-Ray Region

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摘要

为了拓宽软X射线平场全息凹面光栅的工作波段, 提出了并联平场全息凹面光栅的优化设计方法。利用遗传算法, 将两块工作波段不同的平场光栅设计在同一基底上。两块平场光栅的工作波段分别为2~5 nm 和5~30 nm, 两者使用结构完全相同。应用光线追迹的方法, 研究了并联平场光栅的分辨特性, 其分辨率与现有商用平场光栅的分辨率相当。基于光程函数理论, 给出了并联平场光栅的制作光路, 理论设计值和光路优化值的线密度偏差在±1 line/mm以内。 数值模拟结果显示, 并联平场光栅既拓宽了工作波段, 又保证了分辨率与现有平场光栅分辨率相当, 其设计适用于记录更宽波段的软X射线光谱。

Abstract

In order to broaden the wavelength range of flat-field holographic concave grating (FHCG), the optimization method of parallel flat-field holographic concave gratings (PFHCGs) is proposed. Two flat-field gratings working in different wavebands, one for 2~5 nm and the other for 5~30 nm, are designed on the same substrate based on genetic algorithm, and the two gratings can work simultaneously because of the same working structure. Theoretical spectral resolution of PFHCGs is studied via ray-tracing method, which is pretty the same as that of existing commercial FHCG. Based on the optical path function theory, the recording optical path of PFHCGs is given. The results demonstrate the line density deviation is less than ±1 line/mm between theoretical value and optimization value. Simulation results show that the waveband of HPFCGs is broaden and the resolution is also ensured, so it is suitable for recording wider waveband of soft X-ray.

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中图分类号:O433.4

DOI:10.3788/aos201434.0805001

所属栏目:衍射与光栅

基金项目:国家自然科学基金(11105145, 11275205)

收稿日期:2014-02-12

修改稿日期:2014-03-27

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作者单位    点击查看

王庆博:中国科学技术大学国家同步辐射实验室, 安徽 合肥 230029中国科学技术大学工程科学学院精密机械与精密仪器系, 安徽 合肥 230027
刘正坤:中国科学技术大学国家同步辐射实验室, 安徽 合肥 230029
陈火耀:中国科学技术大学国家同步辐射实验室, 安徽 合肥 230029
王宇:中国科学技术大学国家同步辐射实验室, 安徽 合肥 230029
付绍军:中国科学技术大学国家同步辐射实验室, 安徽 合肥 230029

联系人作者:刘正坤(zhkliu@ustc.edu.cn)

备注:王庆博(1989-), 男, 博士研究生, 主要从事平场光栅的设计和制作工艺等方面的研究。E-mail: qbwang@mail.ustc.edu.cn

【1】Li Yingjun, Yang Jianlun, Zhang Jie. Imaging study of flat-field gratings for non-point light source [J]. Acta Physica Sinica, 2000, 49(5): 863-867.
李英骏, 杨建伦, 张杰. 非点光源情况下平场光栅的成像研究[J]. 物理学报, 2000, 49(5): 863-867.

【2】K V Cone, J Dunn, M B Schneider, et al.. Development of a time-resolved soft X-ray spectrometer for laser produced plasma experiments [J]. Rev Sci Instrum, 2010, 81(10): 10E318.

【3】Ni Yuanlong, Mao Chusheng. A soft X-ray flat field grating spectrograph and its experimental applications [J]. China Nuclear Science and Technology Report, 2000, (0): 15-25.
倪元龙, 毛楚生. 软X光平焦场光栅光谱仪及其实验应用[J]. 中国核科技报告, 2000, (0): 15-25.

【4】Zhang Jiyan, Yang Guohong, Zhang Baohan, et al.. Design of a small-sized flat field grating spectrograph [J]. Acta Optica Sinica, 2001, 21(9): 1009-1102.
张继彦, 杨国洪, 张保汉, 等. 小型平焦场光栅光谱仪的研制[J]. 光学学报, 2001, 21(9): 1009-1102.

【5】Zhou Qian, Li Lifeng. Design method of convex master gratings for replicating flat-field concave gratings [J]. Spectroscopy and Spectral Analysis, 2009, 29(8): 2281-2285.
周倩, 李立峰. 光谱仪用平场凹面光栅的凸面母光栅的消像差设计思路[J]. 光谱学与光谱分析, 2009, 29(8): 2281-2285.

【6】Kong Peng, Tang Yuguo, Bayanheshig, et al.. Double-grating minitype flat-field holographic concave grating spectrograph [J]. Acta Optica Sinica, 2013, 33(1): 0105001.
孔鹏, 唐玉国, 巴音贺希格, 等. 双光栅切换微型平场全息凹面光栅光谱仪[J]. 光学学报, 2013, 33(1): 0105001.

【7】J F Wu, Y Y Chen, T S Wang. Flat field concave holographic grating with broad spectral region and moderately high resolution [J]. Appl Opt, 2012, 51(4): 509-514.

【8】T Imazono, M Koike, T Kawachi, et al.. Laminar and blazed type holographic gratings for a versatile soft X-ray spectrograph attached to an electron microscope and their evaluation in the 50~200 eV range [J]. Appl Opt, 2012, 51(13): 2351-2360.

【9】M Koike, M Ishino, T Imazono, et al.. Development of soft X-ray multilayer laminar-type plane gratings and varied-line-spacing spherical grating for flat-field spectrograph in the 1~8 keV region [J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 2009, 64(8): 756-760.

【10】T Harada, T Kita. Mechanically ruled aberration-corrected concave gratings [J]. Appl Opt, 1980, 19(23): 3987-3993.

【11】T Harada, K Takahashi, H Sakuma, et al.. Optimum design of a grazing-incidence flat-field spectrograph with a spherical varied-line-space grating [J]. Appl Opt, 1999, 38(13): 2743-2748.

【12】H Noda, T Namioka, M Seya. Ray tracing through holographic gratings [J]. J Opt Soc Am, 1974, 64(8): 1037-1042.

引用该论文

Wang Qingbo,Liu Zhengkun,Chen Huoyao,Wang Yu,Fu Shaojun. Design of Parallel Flat-Field Gratings in Soft X-Ray Region[J]. Acta Optica Sinica, 2014, 34(8): 0805001

王庆博,刘正坤,陈火耀,王宇,付绍军. 软X射线并联平场光栅的设计[J]. 光学学报, 2014, 34(8): 0805001

被引情况

【1】林达奎,陈火耀,刘正坤,刘颖. 电子束光刻-近场全息法制作平焦场光栅的误差分析及补偿方法. 光学学报, 2018, 38(5): 505003--1

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