中国激光, 1992, 19 (8): 624, 网络出版: 2007-09-11
可调谐TEA CO2激光辐照SiH4击穿过程的研究
Study on the process of SiH4breakdown irradiated by frequency tunable TEA CO2laser
摘要
Abstract
The process of SiH4/Ar breakdown irradiated by frequency tunable TEA CO2 laser has been studied. The breakdown threshold of SiH4/Ar has been measured as a funotiou. of laser energy, laser frequency and gas pressure. Based on the experimental results, the physical process of 8iH4/Ar breakdown is proposed to be a process of optic-breakdown through resonant absorption of laser beams.
张连水, 张贵银, 傅广生, 韩理, 张开锡. 可调谐TEA CO2激光辐照SiH4击穿过程的研究[J]. 中国激光, 1992, 19(8): 624. 张连水, 张贵银, 傅广生, 韩理, 张开锡. Study on the process of SiH4breakdown irradiated by frequency tunable TEA CO2laser[J]. Chinese Journal of Lasers, 1992, 19(8): 624.
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