Chinese Journal of Lasers B, 1992, 1 (1): 24, 网络出版: 2007-09-11
GAS CONTAMINANT EFFECTS IN DISCHARGE EXCITED KrF LASERS
GAS CONTAMINANT EFFECTS IN DISCHARGE EXCITED KrF LASERS
摘要
Abstract
By measuring the effects of halogen concentration on the lifetime of KrF excimer laser, the impurities affecting on the laser output performance are analysed. The experimental results also show that the degration of halogen concentration is related to the laser resonator conditions.
Qihong LOU. GAS CONTAMINANT EFFECTS IN DISCHARGE EXCITED KrF LASERS[J]. Chinese Journal of Lasers B, 1992, 1(1): 24. Qihong LOU. GAS CONTAMINANT EFFECTS IN DISCHARGE EXCITED KrF LASERS[J]. 中国激光(英文版), 1992, 1(1): 24.
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