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Edge effect of optical surfacing process with different data extension algorithms

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Abstract

This study presents a strategy which integrates extra polishing path (EPP) and error map extension to weaken the edge effect in the ultraprecise optical surfacing process. Different data extension algorithms were presented and analyzed. The neighbor-hood average can be selected as the frequently-used method, as it has not bad precision and time-saving performance for most surface forms through the simulation results and practical experiment. The final error map was obtained, its peak-to-valley (PV) was 0.273l and root mean square (RMS) was 0.028l (l=632.8 nm). The edge effect was weakened and suppressed well through the experiment.

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DOI:10.1007/s12200-014-0393-7

基金项目:This work was supported by the Research Grants Council of the Hong Kong Special Administrative Region (No. CityU120610).

收稿日期:2013-12-02

修改稿日期:2013-12-20

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Yang LIU:School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
Haobo CHENG:School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
Zhichao DONG:School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
Hon-Yuen TAM:Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China

联系人作者:Haobo CHENG(chenghaobo@tsinghua.org.cn)

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引用该论文

Yang LIU,Haobo CHENG,Zhichao DONG,Hon-Yuen TAM. Edge effect of optical surfacing process with different data extension algorithms[J]. Frontiers of Optoelectronics, 2014, 7(1): 77-83

Yang LIU,Haobo CHENG,Zhichao DONG,Hon-Yuen TAM. Edge effect of optical surfacing process with different data extension algorithms[J]. Frontiers of Optoelectronics, 2014, 7(1): 77-83

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