高性能X射线聚焦光学元件是实现亚微米分辨率微束X射线荧光分析系统(XRF)的关键器件。给出一种新型的微束XRF系统设计结构,介绍两种典型的X射线聚焦光学元件:X射线聚焦毛细管透镜和X射线组合折射透镜的结构与光学参数。数值计算比较了X射线聚焦毛细管透镜和X射线组合折射透镜的光学聚焦性能。分析结果体现了X射线聚焦组合透镜作为聚焦光学元件在焦斑大小、透过率、强度增益和检测范围等方面的优势。

High performance optical components for focusing X-ray are the crucial part to realize the micro X-ray fluorescence system with the sub-microns spatial resolution. A novel structure of micro XRF is given and the optical parameters for both X-ray focusing capillary lens and X-ray compound refractive lens (CRL) are introduced. Main works of this paper focus on the numerical computing for the optical performance of capillary and CRL. Analysis results show that the X-ray CRL has the advantages in terms of focal spot size, transmittance, etc, when compared with capillary.