中国激光, 1991, 18 (5): 337, 网络出版: 2007-11-12
激光微束装置中的聚焦系统
Laser focusing system in laser-microbeam
摘要
本文提出一种新的激光聚焦系统,用于激光微束装置能获得小于1μm的聚焦光斑。它由一个具有一定倍率的空间滤波系统和一组短焦距、长工作距离的聚焦物镜组成。文中最后给出了测试结果。
Abstract
In this paper a new laser focusing system is presented. Using this system in the laser-microbeam device, focal spot size of less then 1μm was easily obtained. This system composed of a spatial filter and a focusing objective lens with long working distance (l>9mm) and short focal length (f0≤3.25mm). Finally, the test results are given.
朱延彬, 马俊富. 激光微束装置中的聚焦系统[J]. 中国激光, 1991, 18(5): 337. 朱延彬, 马俊富. Laser focusing system in laser-microbeam[J]. Chinese Journal of Lasers, 1991, 18(5): 337.
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