介绍了一种利用波长为800 nm的飞秒激光脉冲在普通单模光纤(SMF)上刻蚀出微型光纤法布里-珀罗干涉(MEFPI)传感器的方法。该方法通过计算机控制就可以进行任意腔长的微型光纤法布里-珀罗干涉传感器的制作。实验研究了光纤法布里-珀罗传感器的应变和温度特性,结果表明,在0～350 με的应变范围内,干涉条纹波长相对于应变的灵敏度为0.006 nm/με,线性度达99.69%;在20～100 ℃的温度范围内,该光纤法布里-珀罗传感器具有较小的负温度特性,干涉条纹往短波方向漂移了0.15 nm。作为全光纤传感器件,该类型传感器重复性高,成本低廉,易于批量加工,在光传感领域具有较大的潜在应用价值。

The fabrication of a micromachining extrinsic Fabry-Perot (F-P) interferometer (MEFPI) within a conventional single-mode fiber (SMF) by using a 800 nm femtosecond laser was reported in this paper. The strain and temperature characteristics of the MEFPI are investigated. The experimental results show that the strain sensitivity is 0.006 nm/με, and linearity is 99.69% at the range of 0 to 350 με. Furthermore, the interference fringe of the MEFPI shifts about 0.15 nm to the short wavelength while the temperature rises from 20 ℃ to 100 ℃. Such kind of in-fiber interference sensors has many advantages, such as compact size, good reliability, low cost, easy fabrication and mass-production, which offers great potential for sensing applications.