数控(NC)加工技术是解决非球面镜加工困难的一种方法。针对激光装置所使用的大口径光学玻璃非球面透镜,提出采用超精密磨削技术来实现高效、高精度的成型加工。通过加工实验研究了控制磨削切深和进给速度对表面加工质量的影响,寻找出大切深缓进给的磨削加工方式,改善了元件表面加工质量,有效抑制了加工过程引入的亚表面缺陷。开展了非球面补偿加工技术实验研究,采用等面形误差曲线补偿加工方法,能有效降低元件面形峰谷(PV)值,通过两次补偿加工,330 mm×330 mm非球面镜的磨削面形误差可控制在约3 μm,获得较为理想的面形加工精度。

Numerical control (NC) machining is an effective method for soluting the problem of aspheric machining. For the application of aspherical lens in large solid-state laser system , a novel method via ultra-precision grinding has been proposed to shape the hard-brittle material with high accuracy and efficiency. To improve the machining quality and efficiency, the machining experiments are carried out to find the influence of grinding depth and feeding speed on surface quality. The subsurface defects have been effectively restrained by adopting the larger grinding depth and smaller feeding speed. And the compensation machining is also investigated. The compensation machining with equal profile error curve can reach fine surface with less than 3-microns error in peak-valleyy (PV) values for 330 mm×330 mm aspherical lens.