设计了一种应用于KrF准分子激光波面整形的二元光学元件(BOE),实现了将波面整形变换为巴特沃斯(Butternorth)分布。采用盖师贝格-撒克斯通(Gerchberg-Saxton,GS)算法实现优化设计,使用MATLAB软件模拟入射和出射光场。通过对比迭代次数分别为10、100和1000次的模拟结果,研究盖师贝格-撒克斯通算法中迭代次数对整形效果的影响。模拟出迭代次数为106次的整形结果,并且得到二元光学元件的相位分布。模拟结果表明,出射光场呈巴特沃斯分布,实现了波面整形,矩形光斑能量占总能量的75.62%,能量的利用率较高,其均匀性的均方根(RMS)误差为0.1394%。

We designed a binary optic element (BOE) applying in the excimer laser wavefront shaping, which can obtain an optical field of Butterworth distribution. We employed the Gerchberg-Saxton (GS) algorithm for realizing the optimization and MATLAB was utilized to simulate the change of optical field. By comparing the simulation results of iterative number with 10, 100 and 1000 respectively, we studied the impacts of iterative number on shaping effects in Gerchberg-Saxton algorithm. Through the shaping result by cimulating about 106 time′s iterations, the phase distribution of binary optic element was obtained. The results present that the distribution of emergent optic field is Butterworth whose energy is 75.62% of total energy and the root mean square (RMS) of uniformity is 0.1394%.