建立了膜-基界面结合强度的红外激光准静态划痕的检测新方法。采用红外激光对膜层样品进行连续划痕,通过摄像机,获得膜-基界面的划痕图像,经过Matlab预处理后准备调用; 同时采用红外热像仪实时在线检测样品表面的受热状态。信号检测系统检测薄膜表面温度和划痕图像等参数,返回信号处理系统进行分析和处理。从而实现对膜-基界面结合强度的检测。

A new detecting method of infrared laser scratching is presented to estimate the bond strength of film-substrate interface. The infrared laser constinuously works on the sample film. The scratching images of the film-substrate interface are obtained by vidicon, and are prepared to be used after Matlab disposal. At the same time, the temperature apparatus system detects the temperature of sample surface in real time. The temperature of sample surface and the scratching image are detected by signal detection system in order to estimate the bond strength of film-substrate interface.