光学学报, 2008, 28 (7): 1420, 网络出版: 2008-07-04   

LiGaO2衬底上ZnO外延膜的结构与光学特性

Structural and Optical Characteristics of ZnO Films on LiGaO2 Substrate
黄涛华 1,2,*周圣明 1滕浩 1,2林辉 1,2王军 1
作者单位
1 中国科学院上海光学精密机械研究所, 上海 201800
2 中国科学院研究生院, 北京 100039
摘要
采用磁控溅射法在(001)、(100)及(010)LiGaO2衬底上制备了ZnO薄膜,通过X射线衍射(XRD)、原子力显微镜(AFM)、透过光谱以及光致发光谱(PL)对薄膜的结构、形貌及光学性质进行了表征。结果表明LiGaO2衬底不同晶面上制备的ZnO薄膜具有不同的择优取向,在(001)、(100)及(010)LiGaO2上分别获得了[0001]、[1100]及[1120]取向的ZnO薄膜; 不同取向的ZnO薄膜表面形貌差异较大; 薄膜在可见光波段具有较高的透过率; 在ZnO薄膜的光致发光谱中只观察到了位于378 nm的紫外发射峰,而深能级发射几乎观察不到,(1100)取向的薄膜紫外发射峰强度最大,半高宽也最小,薄膜光致发光性质的差异主要和晶粒尺寸有关。
Abstract
ZnO films were fabricated on LiGaO2 (001), (100) and (010) planes by magnetron sputtering. The structural, morphological and optical properties of as-grown ZnO films were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), transmission spectra and photoluminescence (PL) spectra. The results show that ZnO films on various planes of LiGaO2 have different preferred orientations. [0001], [1100] and [1120] oriented ZnO films are obtained on LiGaO2 (001), (100) and (010) planes, respectively. The ZnO films show different surface morphologies and high transmittance in visible spectrum range. Only UV emission peaks located at 378 nm are observed in PL spectra of ZnO films. The (1100) ZnO film shows the highest UV emission intensity with the smallest full width at half maximum (FWHM) value. The difference in PL properties of the ZnO films is mainly due to different grain sizes.

黄涛华, 周圣明, 滕浩, 林辉, 王军. LiGaO2衬底上ZnO外延膜的结构与光学特性[J]. 光学学报, 2008, 28(7): 1420. Huang Taohua, Zhou Shengming, Teng Hao, Lin Hui, Wang Jun. Structural and Optical Characteristics of ZnO Films on LiGaO2 Substrate[J]. Acta Optica Sinica, 2008, 28(7): 1420.

本文已被 9 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!