光学仪器, 2006, 28 (4): 60, 网络出版: 2008-08-12
飞秒脉冲激光沉积类金刚石膜实验研究
Experimental research of pulse laser deposition of diamond-like carbon films by femtosecond laser
摘要
期望用类金刚石膜作为硅的红外保护/增透膜,采用波长为800nm,脉宽50fs,重复频率1KHz的Ti:Sapphire飞秒激光器及石墨靶材在单晶Si片上沉积了约0.7μm～1μm厚的类金刚石膜(diamond-like carbon films,DLC),获得了光滑致密,硬度显著提高,红外透过率有一定增加的样品.通过对薄膜拉曼光谱和X射线光电子能谱等的测试,发现单脉冲能量在0.4mJ～1.6mJ范围内变动时,单脉冲能量0.8mJ获得的类金刚石膜综合性能最佳,其对应的焦斑功率密度计算值为1.4×1014W/cm2.
Abstract
郭延龙, 张玺, 曹海源, 袁孝, 张熹, 胡婷婷, 卢常勇, 万强. 飞秒脉冲激光沉积类金刚石膜实验研究[J]. 光学仪器, 2006, 28(4): 60. 郭延龙, 张玺, 曹海源, 袁孝, 张熹, 胡婷婷, 卢常勇, 万强. Experimental research of pulse laser deposition of diamond-like carbon films by femtosecond laser[J]. Optical Instruments, 2006, 28(4): 60.
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