激光焦点的位置控制是激光打孔中需要解决的技术问题之一,在现有的几种激光焦点控制方法中,其技术核心均为如何通过传感器进行有效的信号测量。对于不同材料的激光打孔技术,研制一种适合材料的焦点位置监测系统就显得尤为重要。通过对不同方法的比较和试验,阐述了一种基于声波传感器的激光打孔焦点控制系统,系统通过加工过程中产生的声波作为控制信号,实时对激光焦点位置进行在线的监测和控制,通过对金刚石进行激光打孔试验,并对比传统控制方法,得到了满意的结果。

Measurement and control of the laser beam focus remain to be solved as a technique for laser drilling. There have been developed many methods for laser focus control, where transducers for monitoring focus are key technologies. So the development of focus control system fitted to materials and processing schedule is very important. The sound transducer based laser focus control system is proposed, which uses aural sound as a control parameter, and measures and controlls laser focus in real time on line. Through testing the technology in diamond laser drilling system and comparing it with traditional laser control, we get a satisfying result.