设计了10级同轴结构的陡化前沿Marx发生器，实现了电容储能型脉冲功率调制系统的小型化。该系统采用3nF低电感电容器作为储能电容，采用固体电阻作为充电电阻，通过各级短间隙气体火花开关迅速放电及级间紫外光耦合在50Ω负载上建立了陡化前沿的输出电压波形。在考虑开关电极分散电容、等效传输线效应及回路电感等因素基础上，利用自击穿火花开关模型建立了等效放电电路模型，并利用PSpice电路模拟软件进行了数值模拟。根据数值模拟结果设计加工了10级陡化前沿的Marx发生器实验装置，在较低充电电压下(7kV与11kV)，得到了初步实验结果，输出电压波形大致为方波，相对于传统Marx发生器输出前沿缓慢的三角波有较大改善，半高宽为40～50 ns，前沿时间为十几ns，幅值约为41 kV和57．5kV，实验结果与模拟结果基本一致。

A 10-stage wave erection Marx generator with coaxial structure is designed,which realizes the miniaturization of pulse power modulator with capacitance energy storage. Low-inductance capacitors of 3 nF are chosen as energy storage capacitors,and solid resistors are utilized as charging resistors. By means of rapid discharge of each short gas spark gap and ultraviolet coupling between stages,wave erection can be realized on the output load. Under the consideration of stray capacitance of electrodes to ground,equivalent eccentric transmission line effect and circuit inductance,equivalent circuit model is constructed for PSpice software to simulate the operation process. Under low charging voltage of 7 kV and 11 kV,preliminary experimental results are achieved. The output voltage waveforms are close to square wave,which are much improved compared to the traditional Marx generators' triangle wave form with large rise time. For both situations of 7 kV and 11 kV charged,the full width half maximum of output voltage is 40～50 ns,and the rise time is more than 10 ns,while the amplitudes are 41 kV and 57.5 kV,respectively. Experimental results and calculated results agree basically.