红外与毫米波学报, 2008, 27 (2): 81, 网络出版: 2008-08-17
InP基In0.53Ga0.47As光电探测器的量子效率优化
QUANTUM EFFICIENCY OPTIMIZATION OF InP-BASED In0.53Ga0.47As PHOTODETECTORS
摘要
建立了不同结构的InP基PIN型In0.53Ga0.47As探测器光响应的物理模型.通过引入收集效率函数,模拟计算了探测器量子效率和光响应.采用该模型分别研究了正面进光和背面进光情况下典型的In0.53Ga0.047As/InP PIN探测器的结构参数对器件量子效率的影响.在此基础上提出了两种改进的背照射InGaAs/InP探测器结构,并讨论了其结构参数的优化.
Abstract
A modified physical model on the optical response of InP-based In0.53Ga0.47As PIN photodetectors was presented. By introducing a collecting factor, the optical response and quantum efficiency were simulated. The influences of device parameters on quantum efficiency of typical In0.53Ga0.47As/InP PIN photodetectors under both front and backside illuminated conditions were investigated by using our model. Furthermore, two modified InGaAs/InP PD structures for back-illumination were proposed, and the optimal structural parameters were discussed.
田招兵, 顾溢, 张永刚. InP基In0.53Ga0.47As光电探测器的量子效率优化[J]. 红外与毫米波学报, 2008, 27(2): 81. 田招兵, 顾溢, 张永刚. QUANTUM EFFICIENCY OPTIMIZATION OF InP-BASED In0.53Ga0.47As PHOTODETECTORS[J]. Journal of Infrared and Millimeter Waves, 2008, 27(2): 81.