Chinese Optics Letters, 2008, 6 (8): 619, Published Online: Sep. 2, 2008  

Ultrafast thermoelasticity modeling of microbump formation irradiated by femtosecond laser Download: 566次

Author Affiliations
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
Abstract
Finite element method and ultrafast thermoelasticity model are combined to simulate the microbump formation irradiated by a femtosecond laser. It has been shown that the effect of microbump formation is related to the characteristic of incident femtosecond laser and the thermoelasticity properties of the film. The numerical results exhibit good agreements with the experimental results in both the shape and height of the conical microbump structure, which verify the effectiveness of the ultrafast thermoelasticity model in experiments. It should be helpful for selecting appropriate materials for nanotexturing of thin films by ultrafast lasers.

Zehua Han, Changhe Zhou, Enwen Dai. Ultrafast thermoelasticity modeling of microbump formation irradiated by femtosecond laser[J]. Chinese Optics Letters, 2008, 6(8): 619.

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