Collection Of theses on high power laser and plasma physics, 2007, 5 (1): 127, Published Online: Sep. 18, 2008  

Design and characteristics of piezoelectric actuator with single neuron adaptive PID controller for the grating tiling

Author Affiliations
1 Laboratory of High Power Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, P .R. China
2 Graduate School of the Chinese Academy of Sciences, Beijing 100039, P. R. China
Abstract
In this paper we propose a system with the piezoelectric actuator by the single neuron adaptive PID controller for the grating tiling. Then the design of the control system as well as the control method by considering the nonlinearity of piezoelectric actuators is discussed. At last, close loop position examinations by the capacitive displacement sensor with nanometer scale precision are performed. The experimental results indicate that the system is working effectively. The system is provided with the characters of self-learning, easy calculating and adaptability as well as of a simple structure.

Wang Bin, Wang Yong, Jifeng Zu, Jianqiang Zhu. Design and characteristics of piezoelectric actuator with single neuron adaptive PID controller for the grating tiling[J]. Collection Of theses on high power laser and plasma physics, 2007, 5(1): 127.

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