光学学报, 2008, 28 (11): 2148, 网络出版: 2008-11-17
高斯光束对标准硅球直径测量的影响分析
Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon Sphere Diameter
光学测量 硅球直径测量 高斯光束 多光束干涉 optical measurement silicon sphere diameter measurement Gaussian beam multiple-beam interference
摘要
针对高精度硅球直径测量系统的特点, 分析平面波反射光的多光束干涉和双光束干涉, 以及正入射时高斯光束反射光中心的多光束干涉和双光束干涉, 对不同条件下的高斯光束反射光中心的干涉光强进行了数值模拟。对采用五步相移算法时高斯多光束干涉的影响进行了研究, 给出了特定参数条件下不同束腰ω0和传播距离z时的最大相位误差,当ω0=5 mm, z=2000 mm时的最大相位误差达0.08%。
Abstract
Aiming at the characteristics of a single crystal silicon sphere diameter measuring system, multiple-beam interference and dual-beam interference of the reflected light of a plane wave and those of the central reflected light of a Gaussian beam with normal incidence are analyzed. Also numerical simulations for the reflected interferential intensity of a Gaussian beam center in different situations are presented. Furthermore, the influence of five-step phase-shifting algorithm on Gaussian multiple-beam interference is studied, and the maximal phase errors are shown with some specific parameters. The maximal phase error is 0.08% for beam waist ω0=5 mm and propagation distance z=2000 mm.
康岩辉, 邾继贵, 罗志勇, 叶声华. 高斯光束对标准硅球直径测量的影响分析[J]. 光学学报, 2008, 28(11): 2148. Kang Yanhui, Zhu Jigui, Luo Zhiyong, Ye Shenghua. Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon Sphere Diameter[J]. Acta Optica Sinica, 2008, 28(11): 2148.