在微机电系统技术的基础上, 采用两层多晶硅表面微加工工艺, 设计并加工制作了一种闪耀角可调式的微型可编程光栅。介绍了微型可编程光栅的基本工作原理及结构设计特点, 针对其最主要的一个光学参量——最大闪耀角, 根据设计的光栅结构尺寸进行了理论计算, 并利用ANSYS有限元仿真结合Matlab软件的数据处理功能进行了数值模拟。设计并搭建了一个简单易操作的光学实验系统, 对最大闪耀角进行了实际测量。结果表明, 理论计算、数值模拟以及实际测量的最大闪耀角非常吻合, 制作的微型可编程光栅的最大闪耀角超过5°。

Based on the microelectromechanical systems (MEMS) technology, a new microprogrammable grating with tunable blazing angle was designed and fabricated by using the two-layer polysilicon surface micromachining process. The basic operational principle and structural characterizations fabricated grating were briefly introduced and then the maximum blazing angle, the most important optical parameter, was theoretically computed according to the designed structural dimensions and numerically simulated by combining the finite element simulation tool of ANSYS with Matlab's data processing functionality. A simple but efficient optical system was set up for measuring the maximum blazing angle. The results from simulation, calculation and experiments agree very well with each other. The maximum blazing angle of the fabricated micro programmable grating is larger than 5°.