为进一步优化激光全息干涉实验中的光束参数，获得性质稳定、品质优良的光子结构，基于多光束干涉理论，以2束和3束线偏振光干涉为例，定量和定性模拟了光强与偏振的非均匀性对全息干涉结构的影响。结果表明，随着光束偏振角度差值和光强非均匀性的增大，衬比度呈现递减的趋势，且光束入射角越大，这种影响越小。三束光干涉中偏振和光强变化改变光束的波矢差，从而改变干涉格点形状和衬比度。为全息干涉实验中光强与偏振的控制和调谐提供了理论指导，可促进光学微结构的制备和优化。

In order to optimize the beam parameters further of holographic lithography experiment, based on multi-beam interference theory, the influences of inhomogeneous beam intensity and polarization to the interference patterns are simulated by the two and three linear polarization beams interference quantitatively and qualitatively, respectively. Results show that the structure contrast decreases gradually with the increase of beam polarization difference and intensity heterogeneity. Furthermore, this influence diminishes as the incident angle increasing. The variation of beam polarization and intensity in three beam interference influences wave vector difference, and then alters the lattice shape and structure contrast. Theory guidance is provided to control beam polarization and intensity of holographic interference experiments, which paves a way for the fabrication and optimization of optical micro-structures.