光学学报, 2008, 28 (12): 2321, 网络出版: 2008-12-17
点衍射干涉仪中小孔衍射波面误差分析
Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer
光学检测 点衍射干涉仪 标量衍射 衍射波面误差 optical testing point diffraction interferometer scalar diffraction diffraction wavefront error
摘要
针孔或光纤直径的大小是影响点衍射干涉仪检测精度的重要因素, 在实际检测中须根据检测任务的精度要求来选择小孔的尺寸。基于标量衍射理论, 仿真计算了小孔尺寸引起的衍射波面相对标准球面偏离的误差。结果表明, 当小孔直径为2.5 μm, 数值孔径(NA)为0.3时, 与小孔有关的光学系统误差峰值(PV)约为0.07 nm。仿真方法和计算结果为针对各种高精度面形检测任务而设计点衍射干涉仪和分析其精度提供了理论和数据参考。
Abstract
The diameter of pinhole or fiber is a critical element that affects the precision of point diffraction interferometer (PDI). The dimension of the aperture is determined by variational accuracy of practical measurement. Based on the scalar diffraction theory, the deviation between diffraction wavefront and sphericity aroused by the dimensions of the aperture is simulated and analyzed. The results show the wavefront error of the optical system is about 0.07 nm peak-vally value (PV) when the numerical aperture (NA) is 0.3 and the aperture diameter is 2.5 μm. The method and results of simulation analysis provide theory and data reference for choosing the dimension of aperture along with the analysis or design of PDI for various testing tasks of accuracy requirement.
马强, 刘伟奇, 李香波, 康玉思, 魏忠伦, 冯睿, 柳华. 点衍射干涉仪中小孔衍射波面误差分析[J]. 光学学报, 2008, 28(12): 2321. Ma Qiang, Liu Weiqi, Li Xiangbo, Kang Yusi, Wei Zhonglun, Feng Rui, Liu Hua. Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer[J]. Acta Optica Sinica, 2008, 28(12): 2321.