折射率失配引起的球差导致飞秒激光加工焦点在光轴方向发生位置偏移和焦斑拉伸现象，降低了飞秒激光加工的轴向分辨率和位置精确性，严重影响了飞秒激光加工三维微纳米器件质量。因此，寻求一种合理的补偿设计方案是当前加工技术的一种诉求。利用空间光调制器能够实现光场相位变化的特性，提出在空间光调制器上产生一个与像差函数等值相反的相位信息方法补偿到光路中消除折射率失配引起的球差影响。理论上分析了折射率失配引起球差对加工焦场强度分布影响，通过泽尼克多项式将球差函数进行展开分解，设计针对不同级数的球差矫正的计算全息图，实现球差矫正。该方法不仅能够消除焦斑拉伸畸变，而且能够恢复焦斑位置和强度，为飞秒激光加工中消除折射率失配影响提供了一种较好的解决方案。

Spherical aberration caused by the refractive-index-mismatch leads to the focal spot position shifting and stretching in the femtosecond laser processing, which happen on the optical axis direction. The error impacts the axial resolution and position accuracy in the femtosecond laser processing, meanwhile affecting the quality of three-dimensional micro-nano device in the femtosecond laser processing. Therefore, it is a pressing need for designing a reasonable compensation project within the current processing technology. Based on the theory that the spatial light modulator can achieve the phase change for optical field, this paper proposed a method of opposite phase information. More specifically, the value is equal to aberration function generated but opposite in phase by the spatial light modulator to eliminate spherical aberration caused by the refractive-index-mismatch in the optical path. Initially, the paper analyzes theoretically the effectiveness of the processing the strength of the focus filed due to refractive-index-mismatch. Additionally, with the assistant of Zernike poynomils, decomposing the spherical aberration function design the computer-generated holography (CGH) according to different series of spherical aberration correction and then realizing the spherical aberration correction. This method can not only eliminate the tensile distortion of the focal spot, but also restore location and intensity for the focal spot, and provides a much better solution with eliminating the impact of index mismatch in the femtosecond laser machining.