在微机电系统技术的基础上, 采用两层多晶硅表面微加工工艺, 研制了一种新型的微型可编程光栅, 利用静电驱动方式实现对光栅闪耀角的动态控制。该微型可编程光栅具有结构简单、大闪耀角可调等特点。通过对样件主要性能指标的测试, 得到光栅的下拉电压在110～115 V范围、回复电压在74～65 V范围、谐振频率约78 kHz、调节时间约12 μs, 其最大可工作闪耀角超过5 °, 测量结果与仿真基本吻合。同时探讨了该微型可编程光栅作为光开关应用的可能性, 并针对现有样件存在的问题, 提出了改进意见。

Based on the microelectromechanical systems (MEMS) technology, a new microprogrammable grating with its blazed angle electrostatically modulated was developed using a two-layer polysilicon surface micromachining process, which has a simple structure and a large tunable capability in its blazed angle. A pull-in voltage of 110～115 V, restoring voltage of 74～65 V, resonant frequency of ～78 kHz, adjusting time of ～12 μs, and maximum operational blazed angle of more than 5 ° were achieved. The measured results are basically consistent with the simulation. The possibility of using the new microprogrammable grating as an optical switch was discussed in detail. And a few recommendations were proposed for such application considering the existing problems of the grating.