研究了一种在平面干涉仪上检测大曲率球面光学零件面形的方法, 将在平面干涉仪上得到的干涉条纹通过图像预处理、快速傅里叶变换(FFT)提取相位、解包裹、泽尼克(Zernike)多项式拟合等处理得到被检球面相对标准平面的面形, 与指定的标准球面相减后, 再一次Zernike多项式拟合得到被检球面相对于指定标准球面的面形, 计算出被检球面的面形误差峰谷(PV)值、均方根(RMS)值及工程上常用的光圈N与局部光圈ΔN, 并模拟出用球面干涉仪或球面样板检测时的干涉条纹, 克服了接触检测的缺点, 为高精度、大曲率半径光学零件表面面形的检测提供了一种适用的方法。

A kind of test method of optical surface with big curvature on the plane interferometer is mainly studied, the measured surface error relative to the standard plane appointed has been obtained by some pivotal techniques such as interference fringe processing, fast Fourier transform (FFT) phase distilling, phase unwrapping and Zernike polynomial fitting, then it subtracts the standard spherical surface appointed, so the measured surface error relative to the standard sphere appointed has been obtained by reusing Zernike polynomial. On the basis, PV, RMS, N, ΔN of the measured surface error are calculated, the interference fringe formed by the measured surface relative to the standard sphere is successfully simulated. The method overcomes the disadvantages of contact test, and provides a suitable method particularly to optical surface with high precision and big curvature radius.