理论上分析了静动结合的化学腐蚀法制备探针的具体机理及过程。在静态腐蚀的过程中, 利用流体力学Young-Laplace方程的一级近似解获得了光纤插入到HF酸中形成的新月形高度。在动态腐蚀过程中, 详细分析了当静态腐蚀时间和动态腐蚀时间分别取不同值时, 光纤移动速度对光纤探针结构的影响。利用此法可制备出尖端锐利、大锥角或多锥体等各种结构的光纤探针。这为实验上制备出性能优良的探针, 为拓宽扫描近场光学显微镜的应用范围奠定基础。将上述理论分析的结果与本文实验中所得初步结果进行了比较, 所得结果一致。

The mechanism and process of fabricating fiber probe by combining the static and dynamical chemical etching methods is analyzed. In the process of static etching, the height of the meniscus is obtained by the first-order approximate solution of the Young-Laplace equation. The influence of the velocity of the fiber movement on the shape of the fiber probe is analyzed in detail for different time range of the static and dynamic etching. Probes of various structures, such as large cone angle and short taper or multi-taper, can be formed with the combination of the static and dynamical chemical etching methods. The work establish the foundation for fabricating good probe experimentally and extending the application of scanning near field optical microscope (SNOM). The result of above theoretical analysis is the same to the preliminary result obtained on the experiment.