雅满横向剪切干涉仪是一种很重要的波面检测仪器, 特别是可以对白光的波面进行检测。为了弥补传统雅满横向剪切干涉仪的不足, 提出了一种相移雅满横向剪切干涉仪。它是在雅满横向剪切干涉光路中插入起偏器, 1/4波片和检偏器所形成, 实现了剪切干涉与相移的结合, 能有效地提高测量精度, 可适用于白光的波面检测, 结构简单且操作方便。实验中通过旋转检偏器获得了相移干涉图, 其结果很好地验证了该相移雅满横向剪切干涉仪的有效性。

Jamin lateral shearing interferometer is very useful in wavefront measurement, especially for the white light. To improve the performance, a phase shifting Jamin lateral shearing interferometer is proposed. The interferometer is formed by inserting polarizers, a quarter-wave plate and an analyzer in the Jamin lateral shearing interferometer. The shearing interference is combined with the phase shifting with a simple configuration. With phase shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system. It still suits the wavefront measurement of the white light. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.