为降低溅射过程中基片温度的上升,进而成功制备非晶多孔、纳米微晶态电致变色薄膜和非晶态离子导电薄膜,介绍了一种配置于磁控溅射设备的液氮冷却装置。利用该装置制备了由WO3、NiOx和LiNbO3薄膜组成的单基片全无机电致变色智能窗器件。采用分光光度计对该器件的电致变色性能进行了测试, 并计算了它的漂白和着色态在400 nm到800 nm波长范围内的平均透射率。实验结果表明, 经过50次循环后, 该器件的漂白和着色态的平均透射率分别为61.5%和5.5%。X射线衍射和扫描电镜(SEM)图像显示, 组成该器件的WO3、NiOx和LiNbO3薄膜分别为非晶多孔、纳米微晶和非晶态结构。

In order to slow down the increase of substrate temperature during sputtering and then obtain electrochromic films with amorphous-porous or nano-microcrystalline structures and ion conductive film with amorphous state, a cooling facility based on liquid nitrogen, with magnetron sputtering installation has been proposed. By using the facility, a single-substrate all-inorganic electrochromic smart window device consisting of WO3,NiOx, and LiNbO3 films is prepared. Its electrochromic performance has been measured by spectrophotometer, and transmittance averages of its bleached and colored states in range of 400～800 nm wavelengths have been calculated. Experimental results reveal that after 50 cycles, transmittance averages of bleached and colored states of the device have reached 61.5% and 5.5%,respectively. X-ray diffraction and SEM images show that the structures of the WO3, NiOx, and LiNbO3 films are amorphous-porous, nano-microcrystalline, and amorphous states,respectively.