介绍了一种名为滴定HF吸收法的新方法, 即利用电激励单谱线HF激光器的(0-1)振转谱线, 检测滴定产物HF分子的吸收强度变化, 得到滴定气体(氢气)流量与F原子流量对应关系的方法。用此方法分别测量了在不同NF3流量、不同探测谱线时, 一台电激励HF/DF化学激光器正常工作时的F原子流量, 发现低转动态谱线的吸收更为强烈, 1个NF3分子解离出1.0～1.1个F原子。分析了透射率与HF分子浓度及温度的关系, 对影响测量精度的原因进行了分析并提出相应对策。实验结果显示滴定HF吸收法是一种简单实用的F原子流量检测方法。

We introduce a nove method of measuring fluorine atom flow rate which named titration-HF absorption method. It uses discharge driven single-line HF laser as detect light source, monitors the absorption of titration product-HF molecule, and gets the relationship between F atom flow rate and titration gas (hydrogen gas) flow rate. By this method, in the condition of different NF3 flow rates and different spectra lines, the fluorine atom flow rate of a discharge driven HF/DF chemical laser is measured. It is found that the absorption of lower rotational state line is stronger, and about 1.0～1.1 fluorine atom can be dissociated from one NF3 molecule we analyze the relationship between the transmittance and the fluorine atom flow rate along with the temperature. The factors that influence the measuring precision are also analyzed and the countermeasures are given for the future work. Experiment results prove that the titration-HF absorption method is a simple, useful method of fluorine atom flow rate measuring.