利用几何光学原理, 设计了一套应用于大功率CO2激光陶瓷烧结的均束装置。采用光波导进行均束, 分光镜进行分光, 使得此装置可以应用于陶瓷的双面烧结。其中, 光波导为长200 mm, 横截面为10 mm×10 mm的中空柱形。采用两块呈一定夹角的平面镜组成分光镜。经模拟, 该装置均束效果良好, 基本不受原始激光束光斑质量的影响。用傅里叶光学对光学系统进行分析, 讨论了增加光斑均匀性的方法。由于所有元件都采用反射型, 能量损失低, 光路校正方便, 符合大功率CO2激光器使用要求。

Using geometrical optics, a laser beam homogenizer for high power CO2 has been designed. Laser beam is homogenized by means of waveguide, separate beam with spectroscope, so the device can be used to sintering ceramics on double sides. The waveguide is composed of a square-section tube with four flat rectangular mirrors, and its length is 200 mm, cross section 10 mm×10 mm. Two mirrors that has an angle with each other forms the spectroscope. The uniformity of the power distribution is stable without being affected by original laser beam. Using Fourier optics to analyze system, the method to improving the uniformity has been discussed. Because all the elements have reflecting surface, energy loss is not serious, optical path adjusting is convenient.