可变形反射镜是自适应光学系统的核心组成部分之一, 在人眼像差的检测与校正等方面得到了广泛的应用。目前自适应光学系统最常采用的变形镜主要有两种：微加工薄膜变形镜和压电式变形镜。基于两者结构原理的不同, 它们在自适应光学系统中的表现也存在着差异。采用59通道微加工薄膜变形镜和37通道压电式变形镜进行对比实验。利用同一闭环自适应光学系统针对4阶以内的常见像差(包括散光、彗差、三叶差、球差)观察两者的泽尼克系数生成情况。结果表明, 目标值较小时, 微加工薄膜变形镜和压电式变形镜的泽尼克系数实际值误差都比较小; 目标值增大时, 压电式变形镜可以比微加工薄膜变形镜更接近理想值。

Deformable mirror (DM) is a main device in adaptive optical systems, which is widely used in wavefront correction of human eye. Micromachined membrane deformable mirror (MMDM)and piezoelectric deformable mirror (PDM) are two types of DM, and they perform differently in adaptive optical system because of their different structure. In this article, a 59-channel MMDM and a 37-channel PDM are compared. Zernike generations of common aberrations (including astigmatism, coma, trefoil and spherical aberration) are observed in a close-loop system. It shows that the results are more effective when the target value is smaller.