光学学报, 2009, 29 (7): 1943, 网络出版: 2009-07-20
脉冲压缩光栅光学拼接方法研究
Research on the Multi-Exposure Method to Fabricate Pulse Compression Mosaic Grating
摘要
脉冲压缩光栅是激光约束核聚变系统中的重要光学元件。随着激光约束核聚变工程的快速发展, 对光栅的口径要求越来越大。全息技术是制造大口径脉冲压缩光栅的重要手段, 其制作的光栅大小受限于记录光学系统口径。为了制造出超大口径的脉冲压缩光栅, 提出了一种采用多次曝光拼接技术制作大口径脉冲压缩光栅的方法。该方法采用参考光栅作为检测元件, 利用其再现的光学特性, 以检测记录干涉光场与已记录光栅之间位相匹配情况, 并利用条纹锁定系统控制记录干涉光场的相位, 实现光学拼接制作大口径脉冲压缩光栅的目的。开展了1740 lp/mm光栅拼接实验研究, 拼接对准精度优于30 nm。
Abstract
Pulse compression grating plays very important role in the laser confinement fusion system. Along with the development of laser confinement fusion project, more and more large aperature gratings are needed. Holographic technology is very important means to manufacture large aperature gratings, but the aperature of gratings is limited by the recording system. In order to create large aperature pulse compression grating, the method by several times exposure to fabricate large aperature mosaic gratings is investigated in this paper. The method use a reference grating as a detecting devices to test the phase matching situation between the recording light wave and the recorded grating. By using stripes locking system to control the phase of light wave, the goal of manfacture large aperature compression mosaic grating will be achieved. At last, the mosaic grating experiment is studied. The grating frequency is 1740 lp/mm and the alignment accuracy is better than 30 nm.
李朝明, 吴建宏, 陈新荣, 胡祖元, 钱国林. 脉冲压缩光栅光学拼接方法研究[J]. 光学学报, 2009, 29(7): 1943. Li Chaoming, Wu Jianhong, Chen Xinrong, Hu Zuyuan, Qian Guolin. Research on the Multi-Exposure Method to Fabricate Pulse Compression Mosaic Grating[J]. Acta Optica Sinica, 2009, 29(7): 1943.