中国激光, 2009, 36 (8): 2158, 网络出版: 2009-08-13
用傅里叶变换方法实现的纳米多层膜性能表征
Applications of the Fourier Transform to Characterize the Performances of Nanometer Multilayer Structures
薄膜 纳米多层膜 傅里叶变换 自相关函数 曲线拟合 界面 thin films nanometer multilayer Fourier transform auto-correlation function curve fitting interface
摘要
利用傅里叶变换(FFT)分析了纳米多层膜的X射线掠入射反射率测试曲线, 模拟了各种制备和测试条件对多层膜结构参数测试结果的影响, 检验了傅里叶变换方法的适用性和精确度。分析结果表明, 相对于传统的反射曲线拟合方法, 傅里叶变换方法具有直观和快速的优点, 在不引入主观的膜层结构模型的情况下可以较为准确地定出复杂的多层膜结构参数, 为多层膜结构表征提供了一种分析方法。
Abstract
Fourier transform is used to analyze the grazing incidence X-ray reflectivity curve of nanometer multilayer structures. The influences of preparing and measuring conditions on measuring results of multilayer structure parameters are simulated and the applicability and accuracy of Fourier transform is verified. The results show that the Fourier transform is more intelligible and quicker than traditional curve fitting method. The Fourier transform can exactly determine complex multilayer structure parameters without any subjective layer-structure model, which is a powerful analysis method for characterization of multilayer structures.
蒋晖, 徐敬, 朱京涛, 黄秋实, 白亮, 王晓强, 王占山, 陈玲燕. 用傅里叶变换方法实现的纳米多层膜性能表征[J]. 中国激光, 2009, 36(8): 2158. Jiang Hui, Xu Jing, Zhu Jingtao, Huang Qiushi, Bai Liang, Wang Xiaoqiang, Wang Zhanshan, Chen Lingyan. Applications of the Fourier Transform to Characterize the Performances of Nanometer Multilayer Structures[J]. Chinese Journal of Lasers, 2009, 36(8): 2158.
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