介绍了一种用于MEMS设计的六面体网格划分方法。MEMS工艺决定了大部分MEMS模型都是层状结构,本文针对这种结构提出了一种简便的2.5维划分方法,适用于所有面平行于(x,y)平面或者z轴的层状结构。该方法在(x,y)平面内将模型划分为四边形网格,然后在z方向延伸形成六面体。相比于如今使用最多的Sweep划分算法,它在划分前的预处理更少,由于仅仅需要输入划分大小,使得整个划分过程更加方便,速度也比Sweep方法快了10～1000倍,10000个六面体以内的划分可在10s内完成。同时,该方法也可以通过输入工艺过程参数按照实际MEMS工艺步骤产生3维MEMS模型,完成从2维版图到3维网格的直接生成。

A new meshing method is introduced to obtain a hexahedral mesh for three dimension MEMS models. MEMS models are built from 2 dimensional masks according to a process sequence. In most of cases, it leads to layered geometries, whose faces are parallel to the z axis or the (x,y) plane. This paper describes a new algorithm to create two and a half dimension(2.5D) hexahedral meshes for these layered models. By the method, the quadrilateral meshs in the (x,y) plane are generated and hexahedral elements are created by extending these quadrangles along z axis. Compared with popular Sweeping algorithm, it is faster and simpler to generate a hexahedral mesh. The mesh size is the only parameter to input before meshing and it spends less than 10 s for the mesh with 10 000 hexahedron elements, which is 10 to 1 000 times faster than that of the Sweeping method. Meanwhile, it can generate a MEMS model according to fabrication processes, which creates an easy way from 2 dimensional mask to 3 dimensional mesh.