光电工程, 2009, 36 (1): 114, 网络出版: 2009-10-09
磁流变抛光驻留时间算法
Magnetorheological Finishing Dwell Time Algorithm
摘要
针对磁流变抛光去除量与驻留时间呈线性关系特点,本文以Preston 方程为依据,根据磁流变抛光专用机床的运动形式,提出了基于矩阵的磁流变抛光驻留时间算法,该算法通过调整各点驻留时间控制光学器件表面的去除量,达到面形误差修正的目的,适用于非球面等可用通用光学方程表示的回转对称曲面。仿真实验结果表明,采用该算法仿真加工可以使球形表面面形误差收敛至十几个纳米。通过对K9 光学玻璃球面进行的磁流变抛光实验,获得了表面粗糙度Ra0.636 nm 的球形表面,面形精度P-V 值由抛光前的158.219 nm 减小到52.14 nm,验证了驻留时间算法的合理性。
Abstract
Magnetorheological Finishing (MRF) was an advanced optical machining method. The removal material was related with the dwell time when the work-piece was machined with MRF. On the base of analyzing the effect of machining parameter and the principle of surface control, the MRF dwell time algorithm based on matrix was presented according to Preston equation. The symmetry axis curve surface, such as aspheric surface, which was fit for optics general equation, was machined with MRF machine by using this interpolated algorithm. Simulation experiment results show that the spherical surface error can be constricted less than 20 nm by using the dwell time algorithm. The planar and spheric K9 optics glass was machined with MRF by using the dwell time algorithm, and the spherical surface, whose Ra is 0.636 nm and PV is 52.14 nm, is acquired.
孙希威, 韩强, 于大泳, 刘胜. 磁流变抛光驻留时间算法[J]. 光电工程, 2009, 36(1): 114. SUN Xi-wei, HAN Qiang, YU Da-yong, LIU Sheng. Magnetorheological Finishing Dwell Time Algorithm[J]. Opto-Electronic Engineering, 2009, 36(1): 114.