光电工程, 2009, 36 (3): 130, 网络出版: 2009-10-09
光子筛的超分辨聚焦特性研究
Super-resolution Focus Property of Photon Sieves
衍射光学 光子筛 波带片 聚焦特性 旁瓣抑制 diffraction optics photon sieve zone plate focusing characteristics side lobe suppression
摘要
对光子筛的结构进行了优化设计,通过实验研究了光子筛对355 nm 激光的聚焦特性,并与传统的聚焦元件波带片进行了比较。首先,使用自行编写的光子筛自动生成宏文件程序,优化设计了光子筛图形;制作了特征尺寸为2 μm、适用于355 nm 激光的聚焦光子筛和波带片;搭建了聚焦光斑的测试光路系统,得到了光子筛和波带片对355 nm 激光的聚焦光斑。通过比较分析,得出光子筛具有更好的聚焦特性以及旁瓣抑制能力的结论。
Abstract
Photon sieves were successfully designed after patterns optimization, and the focusing ability of 355 nm laser was investigated and compared with traditional Fresnel zone plates through experiments. Firstly, optimal patterns of photon sieves were automatically generated by the macro program. Secondly, photon sieves and zone plates with 2 μm critical dimension were fabricated for focusing 355 nm lasers. Finally, with focusing-spot testing system, the focusing spot of 355 nm laser was gained for photon sieves and zone plates, and diameters of focusing spots were measured. The experimental results indicate that photon sieves have promising ability to achieve finer focusing spot and suppress more side lobe than zone plates.
李亚文, 陈军宁, 贾佳, 朱效立, 吴璇, 谢常青. 光子筛的超分辨聚焦特性研究[J]. 光电工程, 2009, 36(3): 130. LI Ya-wen, CHEN Jun-ning, JIA Jia, ZHU Xiao-li, WU Xuan, XIE Chang-qing. Super-resolution Focus Property of Photon Sieves[J]. Opto-Electronic Engineering, 2009, 36(3): 130.