光电工程, 2009, 36 (4): 146, 网络出版: 2009-10-09
导电硅橡胶电极片上的介质上电润湿特性
Properties of Electrowetting-on-dielectric on the Conductive Silicone Rubber Electrode Substrate
导电硅橡胶 介质上电润湿 绝缘层参数 conductive silicone rubber electrowetting-on-dielectric parameters of insulating layer
摘要
采用特定的“导电硅橡胶基片/绝缘膜层”微透镜阵列内芯材料,研究其表面的介质上电润湿(EWOD)特性。实验获得了不同绝缘层厚度和相对介电常数下导电液滴接触角随电压变化的图形,得到了不同材料组合的EWOD特性。实验结果表明,导电液滴接触角的余弦值随电压的增大而增大;在硅橡胶绝缘层厚度不同的情况下,绝缘层厚度与接触角余弦值变化率成反比;在绝缘层相同厚度情况下,硅橡胶绝缘层性能要优于派瑞林绝缘层。相关结论为新型微流控光学变焦透镜阵列器件的设计和研制提供了重要依据。
Abstract
The properties of Electrowetting–on–dielectric (EWOD) on the core-surface of optofluidic lens-array with specific “conductive silicon rubber /insulation film” material are one of the important research topics in optofluidics. In this work, the effect of insulation thickness and relative dielectric constant of insulating layer on the contact angle of conductive droplets were analyzed in detail. Then, the characteristics of electrowetting–on–dielectric with different insulating layer materials were also tested. The experimental results show that contact angle increases as the voltage increases. The contact angle varies inversely when changing the thickness of the insulating layer. At a given thickness, it was also observed that the dielectric constant of conductive silicon rubber is of better performance than Parylene. These conclusions are valuable in the field of the design and development of new types of optofluidic zoom lens array devices.
梁忠诚, 李菁, 信恒杰, 杨鹏, 陈陶, 赵瑞. 导电硅橡胶电极片上的介质上电润湿特性[J]. 光电工程, 2009, 36(4): 146. LIANG Zhong-cheng, LI Jing, XIN Heng-jie, YANG Peng, CHEN Tao, ZHAO Rui. Properties of Electrowetting-on-dielectric on the Conductive Silicone Rubber Electrode Substrate[J]. Opto-Electronic Engineering, 2009, 36(4): 146.