光电工程, 2009, 36 (5): 98, 网络出版: 2009-10-09
基于DPGC 技术的激光干涉纳米振动测量系统
Laser Interferometer Nano-vibration Measurement System Based on DPGC Technique
光学测量 激光干涉 振动测量 数字相位载波调制 optical measurement laser interferometer vibration measurement DPGC LabVIEW LabVIEW
摘要
基于数字相位载波调制(DPGC)原理,建立了激光干涉振动测量系统及其信号解调的软硬件处理平台,以24 位数字信号采集卡配合64 位PC 处理器作为硬件电路的核心,实现了参考波形的发生与待测信号的实时采集,利用LabVIEW 软件平台构建了DPGC 算法,实现了振动信号的实时解调。实验结果表明,基于PC 平台的DPGC信号解调方法,降低了传统的模拟PGC 技术中模拟乘法器和微分器等硬件电路的漂移和噪声,提高了信号解调精度,改善了系统信噪比,实现了对频率范围10~200 Hz 低频振动信号的高精度测量,其分辨力达到0.14 nm,动态范围达到120 dB。
Abstract
Based on principle of Digital Phase Generated Carrier (DPGC) modulation, laser interference vibration measurement system and its signal demodulation on software and hardware platform were established. Taking the 24 bit data acquisition device and 64 bit PC processor as the core of hardware circuit, real-time data acquisition of reference waveform generation and the signal for measurement was realized. DPGC algorithm was established by using LabVIEW software workbench, and then vibration signal real-time demodulation was realized. The experiment results indicate that the DPGC signal demodulation scheme based on PC can reduce drift and noise by traditional analog PGC hardware circuit such as analog multiplier and differentiator, enhance accuracy of signal demodulation and improve signal-to-noise of system. High accuracy measurement of the low-frequency vibration signals ranging from 10~200 Hz comes true. The measuring resolution is better than 0.14 nm and the dynamic range is 120 dB.
刘彬彬, 杨军, 苑立波. 基于DPGC 技术的激光干涉纳米振动测量系统[J]. 光电工程, 2009, 36(5): 98. LIU Bin-bin, YANG Jun, YUAN Li-bo. Laser Interferometer Nano-vibration Measurement System Based on DPGC Technique[J]. Opto-Electronic Engineering, 2009, 36(5): 98.