光电工程, 2009, 36 (6): 120, 网络出版: 2009-10-09   

薄反射镜主动光学实验系统

Active Optics Experiment System with Thin-mirror
作者单位
1 中国科学院长春光学精密机械与物理研究所,长春 130033
2 中国科学院长春光学精密机械与物理研究所,长春 130033;中国科学院研究生院,北京 100039
摘要
用口径400 mm、厚12 mm 的薄反射镜作为实验镜进行了主动光学实验。支撑系统由背部12 个主动支撑点和3 个固定支撑点组成,主动支撑点采用由压电陶瓷促动器和压力传感器组成的力促动器,用于控制实验镜面形,固定支撑点用于控制实验镜的定位。通过Shack-Harmann 波前传感器测量镜面面形并拟合出Zernike 像差,用阻尼最小二乘法计算出校正力,通过PID 算法闭环控制各促动器施加力的过程。通过主动校正,将初始支撑状态下的1.16λ (λ=632.8 nm) RMS 面形精度校正到0.07λ RMS,优于镜面抛光后的0.1λ RMS
Abstract
Active optics experiment was carried out with a 400 mm diameter, 12 mm thickness mirror. The support system of the mirror includes 12 active support points and 3 fixed support points. The active support was implemented by force actuator, which was composed of piezoelectric ceramics actuator and loadcell. The active support points were used for controlling the surface of the test mirror, and the fixed points were used for positioning the mirror. The mirror surface was tested by Shack- Hartmann wavefront sensor, the active corrective force was calculated through damp least square method, and the process of exerting force of the actuator was controlled by PID algorithm. The initial surface error is 1.16λ (λ =632.8 nm) RMS. After active correction, the surface error is 0.07λ RMS,which is better than 0.1λ of surface quality after polishing.

李宏壮, 王建立, 林旭东, 刘欣悦, 陈宝刚, 韩昌元. 薄反射镜主动光学实验系统[J]. 光电工程, 2009, 36(6): 120. LI Hong-zhuang, WANG Jian-li, LIN Xu-dong, LIU Xin-yue, CHEN Bao-gang, HAN Chang-yuan. Active Optics Experiment System with Thin-mirror[J]. Opto-Electronic Engineering, 2009, 36(6): 120.

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