光学学报, 2009, 29 (10): 2780, 网络出版: 2009-10-19
傅里叶变换轮廓术物体三维形貌测量的系统分析及其坐标校准方法 下载: 545次
Analysis of Three-Dimensional Measurement System and the Coordinates Calibration in Fourier Transform Profilometry
傅里叶光学 傅里叶变换轮廓术(FTP) 三维测量 相位高度映射 横向坐标校准 Fourier optics Fourier transform profilometry (FTP) three-dimensional measurement phase-height mapping lateral coordinates calibration
摘要
对非共面以及非平行度下的傅里叶变换轮廓术(FTP)物体三维形貌的测量系统进行了分析,采用两个参考平面辅助分析系统光路结构,引入了一个能使双光轴共面的等效虚拟投影出瞳中心。基于光线跟踪原理给出了相位与高度的映射关系,给出了满足平等度的系统参数特性并借助于摄像机坐标系同时获取校准平面的高度以及相应的相位数据,实现了高度和横向坐标的简易校准。实验结果表明了该方法的有效性与可行性。
Abstract
The optical geometry of the Fourier transform profilometry (FTP) which do not have coplanar and parallel limitations is analyzed through two different reference planes,and a fictitious exit pupil of the projector is introduced. The corresponding phase-height mapping is given based on ray tracing,a method to estimate the parallelism is proposed. The camera coordinate system is applied to fulfill the calibration of the height and the lateral coordinates. Experiment results show the effectiveness and feasiblity of the proposed method.
吴双卿, 张引, 张三元, 叶修梓. 傅里叶变换轮廓术物体三维形貌测量的系统分析及其坐标校准方法[J]. 光学学报, 2009, 29(10): 2780. Wu Shuangqing, Zhang Yin, Zhang Sanyuan, Ye Xiuzi. Analysis of Three-Dimensional Measurement System and the Coordinates Calibration in Fourier Transform Profilometry[J]. Acta Optica Sinica, 2009, 29(10): 2780.