光学 精密工程, 2009, 17 (3): 549, 网络出版: 2009-10-28
压电微动工作台的动态迟滞模型
Dynamic hysteresis model of piezopositioning stage
压电微动工作台 运动定位 动态迟滞模型 PI迟滞模型 扫描探针显微镜 piezopositioning stage dynamic positioning dynamic hysteresis model PI hysteresis model scanning probe microscope
摘要
为实现压电微动工作台的快速准确运动定位,研究了其运动定位模型。压电工作台的运动定位精度主要受工作台动态特性和迟滞特性的影响,在介绍这两类典型特性模型及其适用范围的基础上,提出了能够同时体现压电工作台动态特性和迟滞特性的动态迟滞模型,并给出了采用Prandtl-Ishlinskii (PI)迟滞算子的动态迟滞模型参数辨识途径。以TRITOR100型压电工作台为例进行实验研究,结果表明:当压电工作台在30 μm的定位范围内以±900 V/s的输入电压速率进行快速运动定位时,动态迟滞模型的模型精度比以往常用的线性动态模型和迟滞模型有较大提高,其平均误差为0.16 μm,最大误差为0.38 μm,为高性能运动定位工作台控制系统的设计提供了模型基础。
Abstract
In order to realize dynamic positioning of piezopositioning stage with high speed and high accuracy, the motion positioning model of the stage is studied. Because the dynamic positioning accuracy of piezopositioning stage is affected primarily by dynamic property and hysteresis property of the stage,this paper proposes a dynamic hysteresis model of piezopositioning stage after introducing two kinds of typical property models and their applicable scopes. Furthermore,the parameter identification method of the dynamic hysteresis model constituting of Prandtl-Ishlinskii (PI) hysteresis operator is given. Experimental studies on the TRITOR100 piezopositioning stage indicate that the dynamic hysteresis model is more accurate than both the linear dynamic model and PI hysteresis model when the stage positioning is dynamically positioned at high speed in ±900 V/s input voltage within 30 μm positioning range. The mean error of the dynamic hysteresis model is 0.16 μm, and the maximum error is 0.38 μm, which provides foundations for designing high performance control system of piezopositioning stage.
张栋, 张承进, 魏强. 压电微动工作台的动态迟滞模型[J]. 光学 精密工程, 2009, 17(3): 549. ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Optics and Precision Engineering, 2009, 17(3): 549.