设计并给出了一种对轴径向和轴向同时进行支撑的超声波轴承结构,并测试了轴的最大转速。分析了轴承表面超声辐射压力的形成以及超声波轴承的工作原理,在此基础上设计了双向支撑超声波轴承机构,测试了不同悬浮间隙下轴的最大转速。实验结果表明:在轴重85.5 g、悬浮间隙为8.53 μm时,轴最高转速达到了8 946 r/min;说明双向支撑超声波轴承结构可以实现对轴的悬浮支撑,且悬浮间隙越小,轴承对轴的支撑刚度越大,轴的工作稳定性越好,转速越高。

In order to research the levitation capability of a ultrasonic bearing,a bidirectional ultrasonic bearing which levitates and supports a shaft in axial and radial directions respectively was introduced,and the max rotation speed of the shaft was measured.The generation mechanism of the ultrasonic radiation pressure from this kind of bearing and the working principle of the ultrasonic bearing were analyzed,then,a bidirectional support ultrasonic bearing was designed,and the max rotation speeds of the shaft with different levitation clearances were measured.The results indicate that when the shaft weigh is 85.5 g and the levitation clearance is 8.53 μm,the max rotation speed could be 8 946 r/min.The results also show that the bidirectional support ultrasonic bearing could support the shaft in a levitation state,and the smaller the levitation clearance and the greater the bracing stiffness of the bearing support are,the better the stability and the higher the rotation speed of the shaft are.